Engineering Tools

Free, accurate tools for semiconductor process engineers. All conversions use NIST reference data and are performed at STP (Standard Temperature and Pressure).

MFC Gas Flow Unit Converter

Convert between sccm, slm, g/min, and kg/hr for common process gases (N2, Ar, O2, H2, He) at STP conditions. Based on NIST Chemistry WebBook data.

MFCGas Flowsccmslm
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Pressure Unit Converter

Convert between Pa, kPa, MPa, bar, mbar, atm, psi, mmHg, and Torr. Essential for vacuum systems, process control, and semiconductor equipment.

PressureVacuumbarTorrpsi
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sccm → Pumping Speed Calculator

Calculate required pumping speed from flow (sccm/slm) and chamber pressure. Q = S × P. For cryo capacity, throttle analysis, and vacuum troubleshooting.

Pumping SpeedThroughputsccmVacuumCryo
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Advanced Pump Down Time Predictor

Predict chamber pumpdown curve with pump curve, conductance, and gas load (leak, permeation, outgassing). Understand base pressure and pumpdown tails.

Pump DownVacuumChamberOutgassingConductance
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Throughput & Leak Rate Converter

Convert between sccm, mbar·L/s, Torr·L/s, Pa·m³/s and compute leak rate using the pressure rise (rate-of-rise) method.

ThroughputLeak RateRate-of-Risesccm
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Vacuum Conductance & Effective Pumping Speed

Calculate molecular-flow conductance for tubes and orifices, combine components in series/parallel, and compute effective pumping speed at the chamber.

ConductanceSeffVacuumPiping
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Outgassing Load Estimator

Estimate vacuum outgassing load from internal surface area and typical area-based outgassing rates, and approximate base pressure with a given effective pumping speed.

OutgassingBase PressureVacuum
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Pumpdown Log Analyzer

Analyze measured pumpdown logs to estimate S/V or effective pumping speed and approximate gas load using the pumpdown rate equation.

PumpdownLog AnalysisSeffGas Load
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Gas Mixture Partial Pressure Calculator

Compute gas mixture composition and partial pressures from MFC flows and total pressure, with an optional molecular-flow conductance scaling.

Gas MixturePartial PressureDaltonMFC
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Impingement Rate · Monolayer Time · Langmuir

Calculate molecular impingement rate, monolayer formation time, and Langmuir exposure for a given pressure, temperature, and gas species.

ImpingementMonolayerLangmuirSurface
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Mean Free Path Calculator

Calculate gas mean free path (λ) from pressure and gas type. Supports Ar, N2, H2, He, Kr, Xe. For PVD, sputtering, and vacuum process design.

Mean Free PathVacuumPVDSputtering
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