Vacuum Conductance & Effective Pumping Speed

Estimate conductance of tubes and orifices in molecular flow, combine them in series/parallel, and compute the effective pumping speed at the chamber flange.

Calculator

Molecular-flow conductance scales ∝ √(T/M).

Components (tubes/orifices)

Connection is relative to previous element (series = in line, parallel = bypass). Tube formula assumes molecular flow and long tube approximation.

#1
D (cm)
L (cm)
C_air ≈ 12.10 L/s (air @ ~293 K)C_gas,T ≈ 12.10 L/s

S_eff is computed from 1/S_eff = 1/S + 1/C_total (series combination).

Total conductance C_total

12.10 L/s

Effective pumping speed S_eff

11.41 L/s

Limiting factor

Conductance-limited

Technical Explanation

Molecular-Flow Conductance

In the molecular-flow regime, gas molecules collide more often with the walls than with each other. Conductance then depends only on geometry, gas species, and temperature, and becomes independent of pressure. For a circular tube of diameter D and length L (in cm), a widely used approximation for air at room temperature is:

C_tube,air [L/s] ≈ 12.1 · D[cm]³ / L[cm]

For a thin orifice (hole) of area A (cm²), an often used approximation is:

C_hole,air [L/s] ≈ 11.6 · A[cm²]

These formulas come from Dushman and standard vacuum handbooks and are valid for molecular flow and sufficiently long tubes. For very short or wide tubes, end effects become important and more detailed models are needed.

Gas and Temperature Scaling

Molecular-flow conductance is proportional to the mean molecular speed ⟨v⟩, which scales as √(T/M), where T is gas temperature and M is molar mass. The tool scales conductance relative to air at 293 K:

C_gas,T = C_air · √(T / 293 K) · √(M_air / M_gas)

Heavier gases (larger M) have lower conductance, while higher temperature increases conductance slightly.

Series/Parallel Combination & Effective Pumping Speed

Conductances combine like electrical conductances: in parallel they add directly, while in series their reciprocals add:

Parallel: C_total = Σ C_i

Series: 1 / C_total = Σ (1 / C_i)

A pump with speed S connected through a total conductance C_total has an effective pumping speed at the chamber given by:

1 / S_eff = 1 / S + 1 / C_total

This explains why a high-speed pump connected via long, narrow lines can behave like a much smaller pump when viewed from the chamber.

References & Disclaimer

Formulas are approximate and assume molecular flow of air at room temperature. For precise design or transitional/viscous regimes, consult detailed vacuum engineering references and manufacturer conductance data.

Engineering Guide

Why this calculation matters

Catalog pump speed rarely equals chamber S_eff. Foreline diameter, length, bends, and partially open valves dominate molecular-flow systems. Sizing upgrades requires conductance analysis first.

In semiconductor equipment work: Pumpdown bottleneck diagnosis, gate valve conductance checks, foreline redesign, and combining S_pump with piping to get S_eff at the chamber flange.

Input parameters

Elements
Tube (D, L) or orifice (D); series or parallel connection.
Gas and T
√(T/M) scaling relative to air at ~293 K.
Pump speed S
Nominal pump speed at inlet (L/s).

Output interpretation

C per element
Molecular-flow conductance (L/s).
C_total
Combined conductance of network.
S_eff
Effective pumping speed at chamber: 1/S_eff = 1/S + 1/C.

If S_eff ≪ S_pump, fixing the pump will not help — enlarge restriction or open valve. D³ scaling means small diameter increases hurt badly.

Assumptions

  • Molecular flow regime (Kn > ~1); formulas invalid for viscous roughing.
  • Circular tube: C ≈ 12.1·D³/L; orifice: C ≈ 11.6·A (air, ~20–25°C).
  • Series/parallel combination like electrical conductances.

Limitations

  • Bends, elbows, and molecular screens not explicitly modeled — use equivalent length estimates.
  • Transition regime near 1 mTorr in large pipes requires caution.
  • Does not include pump speed pressure dependence.

Worked example

2000 L/s turbo through 10 cm × 120 cm tube + 4 cm orifice

  1. Tube C ≈ 101 L/s; orifice C ≈ 146 L/s; series C_total ≈ 60 L/s.
  2. S_pump = 2000 L/s → S_eff ≈ 58 L/s (~3% of catalog speed).
  3. Conclusion: conductance limits system; foreline/valve improvement first.