Technical Explanation
Impingement Rate (Molecular Flux)
The impingement rate Z is the number of gas molecules striking a unit area of surface per unit time. For an ideal gas, a widely used approximation (with P in Torr, T in K, M in g/mol) is:
Z ≈ 3.5 × 10²² · P[Torr] / √(M · T) molecules/(cm²·s)
This shows that flux is proportional to pressure and inversely proportional to the square root of temperature and molecular mass. Heavier gases (larger M) deliver fewer molecules to the surface at the same pressure.
Monolayer Time
A "monolayer" is often taken as ~10¹⁵ molecules/cm² on a surface. For a sticking coefficient s (0–1), the effective flux that actually adsorbs is Z·s, so the monolayer formation time is roughly:
t_ML ≈ N_ML / (Z · s)
At 10⁻⁶ Torr with s ≈ 1, t_ML is on the order of 1 second, which is why even brief exposures at "good" vacuum can still lead to rapid surface contamination.
Langmuir Exposure
The Langmuir is a convenient unit for exposure defined as:
1 L = 10⁻⁶ Torr·s
For many surface-science contexts, an exposure of ~1 L at s ≈ 1 is taken to correspond to roughly one monolayer. The tool computes Langmuirs for a given pressure and exposure time, and converts this to an approximate number of monolayers using the chosen sticking coefficient.
Practical Interpretation
These estimates help answer questions like "How fast does my surface get dirty at 10⁻⁶ Torr?" or "How long can a wafer be exposed before a monolayer of contamination forms?" Real systems may deviate due to surface chemistry, roughness, multi-layer adsorption, and temperature, so treat the results as order-of-magnitude guides rather than exact predictions.