sccm to kg/hr conversion in semiconductor processes
Practical guide to converting between volumetric (sccm) and mass flow (kg/hr) units for process recipes.
Converting from sccm to kg/hr is essential when process recipes require mass-based flow or when calculating material consumption for cost analysis.
The conversion depends on the gas density at STP: Mass flow (g/min) = sccm × 0.001 × density (g/L). To obtain kg/hr, multiply g/min by 0.06.
For N2 at STP (density 1.25 g/L), 100 sccm ≈ 0.0075 kg/hr. For H2 (density 0.09 g/L), 100 sccm ≈ 0.00054 kg/hr. Always use the correct gas density for accurate conversions.